v10.0
|
Footprint
|
850mm(W)*1100mm(D)*1760mm(H)
|
|
Chamber
|
500mm(W)*500mm(D)*500mm(H)
|
|
Weight
|
880kg
|
|
Facilities
|
3Ψ220V×60Hz×4w，30A
Compressed air： Reaction gas： |
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System control software
|
PLC touch panel or PC based system controller
|
|
Gas flow system
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2 mass flow controllers
|
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Vacuum pump
|
Dry pump
|
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Reactants
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O2、CF4
|
|
Telescopic stage
|
Easy loading accessory
|
|
Cell clamp
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Cell stack holder with stacking accessory
|
|
Consumable parts
|
NO
|
