emitter diffusion using IR belt furnace

EMITTER DIFFUSION USING AN IR BELT FURNACE
M.J.A.A. Goris1 H.H.C.de Moor1 A.W. Weeber1 E.J. Kossen1 H.G. ter Beeke1
L. Frisson2 J. Szlufcik3
1 ECN Solar & Wind Energy, PO Box 1, 1755 ZG Petten, The Netherlands
Phone: +31 224 564505 Fax: +31 224 563214 E-mail: goris@ecn.nl
2SOLTECH N.V., Kapeldreef 60, B-3001 Leuven, Belgium
3IMEC, Kapeldreef 75, B-3001 Leuven, Belgium