Comparison of erent emitter di!usion methods

Comparison of di!erent emitter di!usion methods
for MINP solar cells: Thermal di!usion and RTP
Axel Mrwa*, Gunter Ebest, Michael Rennau, Armand Beyer
Technische Universita( t Chemnitz, Fakulta( t fu( r Elektrotechnik und Informationstechnik,
D-09107 Chemnitz, Germany
Received 2 December 1998; received in revised form 20 May 1999; accepted 6 August 1999